Electrical properties and stabilization of sputtered films by inert gas precipitation
- 15 July 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 36 (1) , 41-45
- https://doi.org/10.1016/0040-6090(76)90394-1
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Gas Incorporation into Sputtered FilmsJournal of Applied Physics, 1967