Proposal of Non-Cylindrical and Large-Area RF Plasma Productions by Surface Wave
- 15 August 1994
- journal article
- Published by Physical Society of Japan in Journal of the Physics Society Japan
- Vol. 63 (8) , 3185-3186
- https://doi.org/10.1143/jpsj.63.3185
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ion Contributions to Planar Radio-Frequency Plasmas Produced by Surface WaveJournal of the Physics Society Japan, 1992
- Nonrepetitive Measurements of Wave and Plasma Parameters along a Low Frequency Surface Wave-Produced Plasma Column by an Interferometer MethodJapanese Journal of Applied Physics, 1989
- Large-diameter plasma columns produced by surface waves at radio and microwave frequenciesJournal of Applied Physics, 1985
- Properties and applications of surface wave produced plasmasRevue de Physique Appliquée, 1982