In situ pseudo—MOS transistor in as-grown silicon on insulator wafers
- 1 October 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 15 (1-4) , 195-198
- https://doi.org/10.1016/0167-9317(91)90211-u
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Optimization of SIMOX for VLSI by electrical characterizationIEEE Transactions on Electron Devices, 1991
- New method for the extraction of MOSFET parametersElectronics Letters, 1988