Residual stress-loaded titanium$ndash$nickel shape-memory alloy thin-film micro-actuators
Open Access
- 22 April 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (3) , 323-327
- https://doi.org/10.1088/0960-1317/12/3/319
Abstract
No abstract availableKeywords
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