Development of stress-optimised shape memory microvalves
- 16 February 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 72 (3) , 243-250
- https://doi.org/10.1016/s0924-4247(98)00221-0
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Recent progress in thin film shape memory microactuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Development of perfect shape memory effect in sputter-deposited Ti-Ni thin filmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Mechanical characterization of shape memory micromaterialsPublished by SPIE-Intl Soc Optical Eng ,1996
- Sputter deposition of TiNi, TiNiPd and TiPd films displaying the two-way shape-memory effectSensors and Actuators A: Physical, 1996
- Thermo-Mechanical Ni50Ti50/Si Composite Thin Film SwitchMRS Proceedings, 1994
- Structure and Thermal Stability in Titanium-Nickel Thin Films Sputtered at Elevated-Temperature on Inorganic and Polymeric SubstratesMRS Proceedings, 1994
- A Silicon-Based Shape Memory Alloy MicrovalveMRS Proceedings, 1992
- Vacuum-deposited TiNi shape memory film: characterization and applications in microdevicesJournal of Micromechanics and Microengineering, 1991
- Thin-film processing of TiNi shape memory alloySensors and Actuators A: Physical, 1990
- Deformation and transition behavior associated with theR-phase in Ti-Ni alloysMetallurgical Transactions A, 1986