Thermo-Mechanical Ni50Ti50/Si Composite Thin Film Switch
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Vacuum-deposited TiNi shape memory film: characterization and applications in microdevicesJournal of Micromechanics and Microengineering, 1991
- Cycling Times of Thin-Film NiTi on SiMRS Proceedings, 1991
- Thin-film processing of TiNi shape memory alloySensors and Actuators A: Physical, 1990
- Stresses and deformation processes in thin films on substratesCritical Reviews in Solid State and Materials Sciences, 1988
- ASYMPTOTIC ANALYSIS OF THE THERMAL STRESSES IN A TWO-LAYER COMPOSITE WITH AN ADHESIVE LAYERJournal of Thermal Stresses, 1985
- The tension of metallic films deposited by electrolysisProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1909