ALLIGATOR−An apparatus for ion beam assisted deposition with a broad-beam ion source
- 1 April 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (4) , 2411-2413
- https://doi.org/10.1063/1.1142946
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Equipment for ion beam assisted depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987