Optically activated silicon microresonator transducers: An assessment of material properties
- 1 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3) , 711-716
- https://doi.org/10.1016/0924-4247(91)87075-e
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Transient excitation of silicon microresonatorElectronics Letters, 1989
- Silicon in mechanical sensorsJournal of Physics E: Scientific Instruments, 1988
- Self-excited vibrations of optical microresonatorsElectronics Letters, 1988
- Optically Excited And Interrogated Micromechanical Silicon Cantilever StructurePublished by SPIE-Intl Soc Optical Eng ,1987
- Optical activation of a silicon vibrating sensorElectronics Letters, 1986
- Optically activated vibrations in a micromachined silica structureElectronics Letters, 1985