A SIMS and AES examination of a Cu/Co/Si alloy

Abstract
The present paper deals with SIMS and AES examination of the layer structure developing during the annealing of a Cu/Co/Si alloy. It was discovered from the spectra and Auger images that there is a significant local increase of the concentration of the alloying materials. A surface layer develops during heat treatment of the alloy sample. We prove the presence of CoSi clusters and the joint enrichment of Si and Co.