Modification of Surface Layers by Irradiation with a Long-Pulse Intense Ion Beam
- 1 April 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (4A) , L719
- https://doi.org/10.1143/jjap.27.l719
Abstract
The effects of irradiation produced by long-pulse, intense ion beams on metal surfaces (Al, stainless steel and Ti) and silicon surfaces were investigated. These beams were comprised of proton or carbon ions with pulse widths of ∼300 ns, current densities of \lesssim1 kA/cm2 and energies of ∼80 keV. The observed molten surface structures and recrystallized layers (20 µm depth) indicated that the surfaces reached high temperatures as a result of the irradiation. Changes in the X-ray diffraction patterns also indicated recrystallization by a rapid heating of the surfaces. Titanium carbide was produced by carbon-ion irradiation on a titanium surface; this process was verified by ESCA measurements.Keywords
This publication has 5 references indexed in Scilit:
- Production of Pulse Intense Ion Beam of the Current Density over a Hundred Times Larger than the Child-Langmuir Limit by Magnetieally-Insulated Ion DiodeJapanese Journal of Applied Physics, 1987
- Effect of scrape-off plasma on the modification of a TiC-coated surfaceJournal of Nuclear Materials, 1986
- Pulsed ion beam irradiation of siliconNuclear Instruments and Methods in Physics Research, 1982
- Ion beam annealing of semiconductorsApplied Physics Letters, 1980
- Electrochemical properties of ion implanted steelSurface Science, 1979