Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS
- 1 January 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 95 (2-3) , 212-221
- https://doi.org/10.1016/s0924-4247(01)00740-3
Abstract
No abstract availableKeywords
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