A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension
- 1 June 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 7 (2) , 192-200
- https://doi.org/10.1109/84.679356
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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