Energetic particle fluxes in magnetron sputter deposition of a-Si:H
- 1 January 1991
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 137-138, 783-786
- https://doi.org/10.1016/s0022-3093(05)80237-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Monte Carlo simulations of magnetron sputtering particle transportJournal of Vacuum Science & Technology A, 1991
- Investigation of the void structure in amorphous germanium thin films as a function of low-energy ion bombardmentJournal of Vacuum Science & Technology A, 1988
- Neutral radical deposition from silane dischargesJournal of Applied Physics, 1988
- The microstructure of sputter‐deposited coatingsJournal of Vacuum Science & Technology A, 1986