Determination of the Thickness OF SiO2-Layers on Si by X-Ray Analysis and by X-Ray Photoelectron Spectroscopy
- 1 January 1980
- book chapter
- Published by Springer Nature
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Evaluation of XPS-data of oxide layersJournal of Electron Spectroscopy and Related Phenomena, 1979
- Zur bestimmung der reduzierten dicke D/λ dünner Schichten mittels XPSJournal of Electron Spectroscopy and Related Phenomena, 1978
- Quantitative chemical analysis by ESCAJournal of Electron Spectroscopy and Related Phenomena, 1976
- Solid state—and surface—analysis by means oF angular-dependent x-ray photoelectron spectroscopyProgress in Solid State Chemistry, 1976