A study of the coupling efficiency versus grating periodicity in a normal incident GaAs/AlGaAs multiquantum well infrared detector
- 15 September 1992
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (6) , 2105-2109
- https://doi.org/10.1063/1.351597
Abstract
A detailed study of the dependence of coupling quantum efficiency on the grating periodicity of planar metal grating coupled GaAs/AlGaAs quantum well infrared photodetectors has been made in this work. Five different detector samples with grating periodicities of Λ=1.1, 3.2, 5, 7, and 10 μm have been fabricated for the present study. The results showed that the device with a 5 μm grating periodicity gave the best front‐side coupling efficiency, which was in good agreement with our theoretical prediction. A single pass quantum efficiency (η) of 11% was achieved for the front‐side illumination at λp=9.8 μm and T=77 K.This publication has 20 references indexed in Scilit:
- Novel all-optical 10 μm waveguide modulator based on intersubband absorption in GaAs/AlGaAs quantum wellsApplied Physics Letters, 1991
- Largely enhanced bound-to-miniband absorption in an InGaAs multiple quantum well with short-period superlattice InAlAs/InGaAs barrierApplied Physics Letters, 1991
- Near-unity quantum efficiency of AlGaAs/GaAs quantum well infrared detectors using a waveguide with a doubly periodic grating couplerApplied Physics Letters, 1991
- Broadband 8–12 μm high-sensitivity GaAs quantum well infrared photodetectorApplied Physics Letters, 1989
- GaAs/AlGaAs multiquantum well infrared detector arrays using etched gratingsApplied Physics Letters, 1989
- Grating enhancement of quantum well detector responseApplied Physics Letters, 1988
- Photovoltaic detection of infrared light in a GaAs/AlGaAs superlatticeApplied Physics Letters, 1988
- New 10 μm infrared detector using intersubband absorption in resonant tunneling GaAlAs superlatticesApplied Physics Letters, 1987
- Surface-irregularity-enhanced subband resonance of semiconductors. I. General theoryPhysical Review B, 1984
- A new infrared detector using electron emission from multiple quantum wellsJournal of Vacuum Science & Technology B, 1983