TfP259. Growth of PLZT thin films using cluster magnetron techniques
- 1 September 1992
- journal article
- research article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 134 (1) , 349-354
- https://doi.org/10.1080/00150199208015611
Abstract
The deposition of PLZT thin films by cluster magnetron techniques is described. X-ray photoelectron spectroscopy has been used to determine film composition over a range of substrate temperatures. As-deposited films have been studied by X-ray diffraction techniques and the role of post deposition annealing has been assessed. The morphology and growth rates have been determined.Keywords
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