The preparation, characterization and applications of silicon nitride thin films
- 1 January 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 65 (2) , 171-208
- https://doi.org/10.1016/0040-6090(80)90254-0
Abstract
No abstract availableThis publication has 221 references indexed in Scilit:
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