Ion enhanced gas-surface reactions: A kinetic model for the etching mechanism
- 2 February 1981
- journal article
- Published by Elsevier in Surface Science
- Vol. 103 (2-3) , 524-534
- https://doi.org/10.1016/0039-6028(81)90282-x
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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