2-D analytic model for inductively coupled plasma sources. I. Electromagnetic model and kinetic analysis
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 23 (1) , 65-73
- https://doi.org/10.1109/27.376562
Abstract
No abstract availableKeywords
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