Compressive stress induced formation of preferred orientation in glassy carbon following high-dose C+implantation
- 1 October 1995
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine A
- Vol. 72 (4) , 1031-1041
- https://doi.org/10.1080/01418619508239951
Abstract
It is well established that ion irradiation of glassy carbon with energetic ions leads to the formation of a dense amorphous surface layer. In the present work we show using cross-sectional Tem that oriented graphite-like regions are formed within the implanted layer of glassy carbon implanted with 50 keV C ions at high doses. The preferred orientation is such that the sp2 bonded graphite-like sheets lie normal to the implanted surface. Stress measurements of the implanted material show the presence of a biaxial compressive stress. Thermodynamic calculations predict that a non-hydrostatic stress can result in preferred orientation in anisotropic materials such as graphite. The preferred orientation can therefore be explained in terms of the combined effects of the mobility introduced by the implanted ions and the anisotropic stress field.Keywords
This publication has 14 references indexed in Scilit:
- Structural investigation of xenon-ion-beam-irradiated glassy carbonPhysical Review B, 1994
- Generation and applications of compressive stress induced by low energy ion beam bombardmentJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Ion-beam induced compaction in glassy carbonJournal of Applied Physics, 1993
- Stress and plastic flow in silicon during amorphization by ion bombardmentJournal of Applied Physics, 1991
- Compressive-stress-induced formation of thin-film tetrahedral amorphous carbonPhysical Review Letters, 1991
- Structure modification of radio frequency sputtered LaB6 thin films by internal stressJournal of Vacuum Science & Technology A, 1991
- Ion-implanted graphitic carbonsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Effect of ion bombardment during deposition on the x-ray microstructure of thin silver filmsJournal of Vacuum Science & Technology A, 1985
- Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon filmsPhysical Review B, 1984
- Electrical conduction in glassy carbonJournal of Non-Crystalline Solids, 1978