Examination of rapid thermal annealed GaAs using cathodoluminescence

Abstract
Samples of semi-insulating GaAs were annealed for 5–18 s at 650–950 °C using rapid thermal annealing. Cathodoluminescence was used to compare as-received and annealed samples to determine the effect of the heat treatment. Cathodoluminescence images of the surface of samples show a change in background intensity after heating. Images of cleaved cross sections indicate that the change is not uniform throughout the thickness of the sample.