Buckling of polysilicon microbeams during sacrificial layer removal
- 1 September 1998
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 8 (3) , 243-249
- https://doi.org/10.1088/0960-1317/8/3/011
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Buckling Instability of Straight Edge CracksJournal of Applied Mechanics, 1995
- A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin filmsJournal of Materials Research, 1992
- Growth and configurational stability of circular, buckling-driven film delaminationsActa Metallurgica et Materialia, 1992
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988