Porous silicon bulk micromachining for thermally isolated membrane formation
- 1 May 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 60 (1-3) , 235-239
- https://doi.org/10.1016/s0924-4247(97)01384-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990
- A new dielectric isolation method using porous siliconSolid-State Electronics, 1981