Planar, embedded InP/GaInAs p-i-n photodiode with very high-speed response characteristics

Abstract
A surface‐illuminated InP/GaInAs pin photodiode with a planar, embedded structure has been fabricated. By minimizing the stray capacitance and by using semi‐insulating substrates, the capacitance has been reduced to 0.08 pF for a diode with a diameter of 20 μm. It has been demonstrated that this photodiode has a very high‐speed response of greater than 10 GHz. The present structure is suitable not only as a discrete pin photodiode but also for optoelectronic integration.