Properties of multilayer and alloyed PVD films on the base of TiN
- 31 December 1996
- journal article
- Published by Elsevier in International Journal of Refractory Metals and Hard Materials
- Vol. 14 (1-3) , 105-107
- https://doi.org/10.1016/0263-4368(96)83423-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Structure and microhardness of TiN compositional and alloyed filmsThin Solid Films, 1991
- Multilayer coatings—influence of fabrication parameters on constitution and propertiesSurface and Coatings Technology, 1990
- On spinodal decomposition in magnetron-sputtered (Ti,Zr) nitride and carbide thin filmsThin Solid Films, 1989
- On the properties of physically vapour-deposited Ti-Al-V-N coatingsThin Solid Films, 1987