Properties of aluminum nitride films by an ion beam and vapor deposition method
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 178-181
- https://doi.org/10.1016/0168-583x(89)90766-0
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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