Structural modifications in a-C:H films doped and implanted with nitrogen
- 1 January 1994
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 3 (1-2) , 88-93
- https://doi.org/10.1016/0925-9635(94)90036-1
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin filmsApplied Physics Letters, 1992
- Atomic constraint in hydrogenated ‘‘diamond-like’’ carbonApplied Physics Letters, 1991
- Gas evolution from hydrogenated amorphous carbon filmsJournal of Applied Physics, 1990
- The properties of a-C:H films deposited by plasma decomposition of C2H2Journal of Applied Physics, 1990
- The study of mechanical properties of a-C:H films by Brillouin scattering and ultralow load indentationJournal of Applied Physics, 1989
- Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-activeGandDbandsPhysical Review B, 1989
- The deposition and study of hard carbon filmsJournal of Applied Physics, 1989
- The effect of heavy-ion bombardment on the properties of hard a-C:H (i-C) filmsJournal of Vacuum Science & Technology A, 1988
- Low-Pressure, Metastable Growth of Diamond and "Diamondlike" PhasesScience, 1988
- Empirical categorization and naming of “diamond-like” carbon filmsThin Solid Films, 1986