Correlation of dynamic friction and the dislocation etch pit density surrounding annealed scratches in (1 1 1) p-type silicon
- 1 July 1988
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 23 (7) , 2607-2612
- https://doi.org/10.1007/bf01111922
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Surface damage of single-crystal silicon abraded in ethanol and deionized waterJournal of Materials Science, 1985
- The wear rate of n-type Si(100)Wear, 1985
- Minimum Silicon Wafer Thickness for ID WaferingJournal of the Electrochemical Society, 1982
- Effect of Lubricant Environments on Saw Damage in Si WafersJournal of the Electrochemical Society, 1980
- ID-Diamond-Sawing Damage to Germanium and SiliconJournal of the Electrochemical Society, 1969
- Surface damage on abraded silicon specimensPhilosophical Magazine, 1963