Fluence-dependent transmission of polyimide at 248 nm under laser ablation conditions
- 25 February 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (8) , 793-795
- https://doi.org/10.1063/1.104518
Abstract
Transmission experiments on thin polyimide films under laser ablation conditions using 248 nm KrF laser radiation have been performed. The transmitted temporal pulse shapes and the transmittted intensity show fluence-dependent absorption as predicted by a recent theoretical description of the pulsed ultraviolet laser ablation process.Keywords
This publication has 6 references indexed in Scilit:
- Comparison of theoretical models of laser ablation of polyimide with experimental resultsChemical Physics, 1990
- Ultrafast imaging of ultraviolet laser ablation and etching of polymethylmethacrylateApplied Physics Letters, 1989
- Theory for the etching of organic materials by ultraviolet laser pulsesApplied Physics Letters, 1989
- Ultraviolet laser ablation of polyimide filmsJournal of Applied Physics, 1987
- Excimer laser etching of polyimideJournal of Applied Physics, 1985
- Theory of photoablation and its implications for laser phototherapyThe Journal of Physical Chemistry, 1985