Energy distributions of neutral atoms sputtered from Cu, V and Nb under different bombardment and ejection angles

This publication has 11 references indexed in Scilit:

• The energy distribution of sputtered particles at low bombarding energies
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
• The velocity distribution of sputtered Zr atoms for irradiation at normal and oblique angle of incidence
  Applied Physics A, 1984
• On the energy distribution and angular distribution of sputtered particles
  Radiation Effects, 1980
• Sputtering yields for light ions as a function of angle of incidence
  Applied Physics A, 1979
• Deconvolution and smoothing: Applications in ESCA
  Journal of Electron Spectroscopy and Related Phenomena, 1975
• Sputtering—a review of some recent experimental and theoretical aspects
  Applied Physics A, 1975
• Electron cyclotron wave resonances and power absorption effects in electrodeless low pressure h.f. plasmas with a superimposed static magnetic field
  Plasma Physics, 1974
• Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keV
  The European Physical Journal A, 1973
• Energieverteilungen bei der Festkörperzerstäubung durch Ionenbeschuß
  The European Physical Journal A, 1970
• II. The energy spectrum of ejected atoms during the high energy sputtering of gold
  Philosophical Magazine, 1968