Determination of Trace Impurities in Corrosive Gases by Gas-Phase FTIR
- 1 November 1993
- journal article
- Published by Oxford University Press (OUP) in Bulletin of the Chemical Society of Japan
- Vol. 66 (11) , 3508-3510
- https://doi.org/10.1246/bcsj.66.3508
Abstract
Trace moisture and other potential impurities (CO2, CH4, C2H6, and alkyl halides) in HCl and in HBr gases were analyzed by gas-phase FTIR spectroscopic technique. The detection limit was estimated to be 100 ppb with 2 cm−1 spectral resolution for 5-min measurement time at 1.2 kg cm−2 pressure, using an MCT detector and an 8-m-pathlength gas cell with BaF2 windows.This publication has 6 references indexed in Scilit:
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