Nanometer patterning of InP using aerosol and plasma etching techniques
- 17 August 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (7) , 837-839
- https://doi.org/10.1063/1.107761
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Generation of monodisperse Ag- and NaCl-aerosols with particle diameters between 2 and 300 nmPublished by Elsevier ,2003
- Vapor phase synthesis of crystalline nanometer-scale GaAs clustersApplied Physics Letters, 1992
- Making quantum wires and boxes for optoelectronic devicesMaterials Science and Engineering: B, 1991
- Bipolar Charge Distributions of Aerosol Particles in High-Purity Argon and NitrogenAerosol Science and Technology, 1991