Preparation of PbTiO3 thin films at low temperature by an excimer laser ablation technique
- 4 November 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (19) , 2354-2356
- https://doi.org/10.1063/1.106038
Abstract
We have formed PbTiO3 thin films on (100) SrTiO3 substrates at a temperature of 350 °C using an ArF excimer laser ablation technique. Until now, PbTiO3 films have not been formed at temperatures lower than 500 °C using other thin‐film techniques. The important points in the present study are the laser excitation of the substrate during the film growth and the lattice matching between the film and the substrate. The film deposited on the SrTiO3 substrate shows preferential orientation of the c‐axis perpendicular to the substrate surface.Keywords
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