The engineering of intrinsic point defects in silicon wafers and crystals
- 1 April 2000
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 73 (1-3) , 87-94
- https://doi.org/10.1016/s0921-5107(99)00439-0
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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