Nucleation and growth of faceted voids in silicon crystals

This publication has 7 references indexed in Scilit:

• Vacancy-type microdefect formation in Czochralski silicon
  Journal of Crystal Growth, 1998
• Relationship between grown-in defects and thermal history during CZ Si crystal growth
  Journal of Crystal Growth, 1997
• Transmission Electron Microscope Observation of “IR Scattering Defects” in As-Grown Czochralski Si Crystals
  Japanese Journal of Applied Physics, 1996
• The Direct Observation of Grown‐in Laser Scattering Tomography Defects in Czochralski Silicon
  Journal of the Electrochemical Society, 1996
• The effect of thermal history during crystal growth on oxygen precipitation in Czochralski-grown silicon
  Semiconductor Science and Technology, 1992
• Electron-Microscopic Study of Microdefects in Silicon Single Crystals Grown at High Speed
  Physica Status Solidi (a), 1984
• The mechanism of swirl defects formation in silicon
  Journal of Crystal Growth, 1982