Proton Magnetic Resonance Spectra of Plasma-Deposited Amorphous Si: H Films
- 21 January 1980
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 44 (3) , 193-196
- https://doi.org/10.1103/physrevlett.44.193
Abstract
Proton magnetic resonance data are presented for a series of plasma-deposited -Si: H films with hydrogen contents ranging from 32 to 8 at.%. Line-shape and line-width analysis leads to the conclusion that the spatial distribution of hydrogen is inhomogeneous in all samples.
Keywords
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