Micronozzle/diffuser flow and its application in micro valveless pumps
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 81-87
- https://doi.org/10.1016/s0924-4247(98)00115-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Micro-fluid Flow In MicrochannelPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A Valve-less Planar Pump In SiliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Micromachined flat-walled valveless diffuser pumpsJournal of Microelectromechanical Systems, 1997
- Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in siliconJournal of Microelectromechanical Systems, 1997
- Microflow devices and systemsJournal of Micromechanics and Microengineering, 1994