Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon
- 1 March 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 6 (1) , 41-47
- https://doi.org/10.1109/84.557529
Abstract
No abstract availableKeywords
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