Fast three-dimensional laser micromachining of silicon for microsystems
- 1 March 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 52 (1-3) , 121-125
- https://doi.org/10.1016/0924-4247(96)80136-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Three-dimensional nanostructures by direct laser etching of SiApplied Surface Science, 1995
- Three-dimensional laser direct writing: Applications to multichip modulesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Stereo laser micromachining of siliconApplied Physics Letters, 1992
- Rapid direct writing of high-aspect ratio trenches in silicon: Process physicsJournal of Vacuum Science & Technology B, 1988