Three-dimensional nanostructures by direct laser etching of Si
- 1 February 1995
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 86 (1-4) , 568-576
- https://doi.org/10.1016/0169-4332(94)00466-8
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Monolithic microbridges in silicon using laser machining and anisotropic etchingSensors and Actuators A: Physical, 1993
- Laser-chemical three-dimensional writing for microelectromechanics and application to standard-cell microfluidicsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Stereo laser micromachining of siliconApplied Physics Letters, 1992
- Rapid direct writing of high-aspect ratio trenches in silicon: Process physicsJournal of Vacuum Science & Technology B, 1988
- Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germaniumPhysical Review B, 1984
- Nonreciprocal laser-microchemical processing: Spatial resolution limits and demonstration of 0.2-μm linewidthsApplied Physics Letters, 1984
- Laser-induced periodic surface structure. I. TheoryPhysical Review B, 1983
- Growth of spontaneous periodic surface structures on solids during laser illuminationPhysical Review B, 1982
- Laser chemical technique for rapid direct writing of surface relief in siliconApplied Physics Letters, 1981
- Temperature rise induced by a laser beamJournal of Applied Physics, 1977