Monolithic microbridges in silicon using laser machining and anisotropic etching
- 31 August 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 37-38, 661-665
- https://doi.org/10.1016/0924-4247(93)80112-t
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Fabrication of microchannels by laser machining and anisotropic etching of siliconSensors and Actuators A: Physical, 1992
- Micro resonant force gaugesSensors and Actuators A: Physical, 1992
- Silicon pressure sensor based on a resonating elementSensors and Actuators A: Physical, 1991
- Piezoelectrically driven silicon beam force sensorSensors and Actuators A: Physical, 1991
- A sensitive optically excited resonator pressure sensorSensors and Actuators A: Physical, 1990
- Thin-film ZnO as micromechanical actuator at low frequenciesSensors and Actuators A: Physical, 1990
- Use of Modified Free Energy Theorems to Predict Equilibrium Growing and Etching ShapesJournal of Applied Physics, 1962