Thin-film ZnO as micromechanical actuator at low frequencies
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 226-228
- https://doi.org/10.1016/0924-4247(90)85044-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Resonant diaphragm pressure measurement system with ZnO on Si excitationSensors and Actuators, 1983
- Piezoelectric thin films for saw applicationsFerroelectrics, 1982
- Low-frequency piezoelectric-transducer applications of ZnO filmApplied Physics Letters, 1974