Thermoelectric power sensor for microwave applications by commercial CMOS fabrication
- 1 September 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 18 (9) , 450-452
- https://doi.org/10.1109/55.622527
Abstract
This work describes an implementation of a thermoelectric microwave power sensor fabricated through commercial CMOS process with additional maskless etching. The sensor combines micromachined coplanar waveguide and contact pads, a microwave termination which dissipates heat proportionally to input microwave power, and many aluminum-polysilicon thermocouples. The device was designed and fabricated in standard CMOS technology, including the appropriate superimposed dielectric openings for post-fabrication micromachining. By removing the bulk silicon located beneath the device through micromachining, thermal and electromagnetic losses are minimized. The sensor measures signal true RMS power in the frequency range up to 20 GHz with input power in the -30 dBm to +10 dBm range. Over this 40 dB dynamic range, output voltage versus input power is linear within less than /spl plusmn/0.16%. Automatic network analyzer data show an acceptable input return loss of less than -30 dB over the entire frequency range.Keywords
This publication has 9 references indexed in Scilit:
- Micromachined thermocouple microwave detector in CMOS technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Silicon power microsensor with frequency range from DC to microwavePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromachined microwave transmission lines in CMOS technologyIEEE Transactions on Microwave Theory and Techniques, 1997
- Characterization of the broadband transmission behavior of interconnections on silicon substratesIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1993
- Micromachined circuits for millimeter- and sub-millimeter-wave applicationsIEEE Antennas and Propagation Magazine, 1993
- Large suspended inductors on silicon and their use in a 2- mu m CMOS RF amplifierIEEE Electron Device Letters, 1993
- Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequenciesIEEE Microwave and Guided Wave Letters, 1993
- Thermoelectric AC power sensor by CMOS technologyIEEE Electron Device Letters, 1992
- AC-DC difference calibrationsPublished by National Institute of Standards and Technology (NIST) ,1989