Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies
- 1 March 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Microwave and Guided Wave Letters
- Vol. 3 (3) , 61-63
- https://doi.org/10.1109/75.205665
Abstract
The development of micromachining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, a WR-10 waveguide has been fabricated fromKeywords
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