A comparison of methods for accurate film thickness measurement
- 1 May 1972
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 5 (5) , 445-449
- https://doi.org/10.1088/0022-3735/5/5/021
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Film thickness measurement by absolute methodsVacuum, 1970
- A simple scatter method for optical surface roughness and slope measurements. Roughness of polished fused silicaJournal of Physics E: Scientific Instruments, 1970
- The application of fringes of equal chromatic order to the assessment of the surface roughness of polished fused silicaJournal of Physics E: Scientific Instruments, 1970
- Effect of Polishing Technique on the Roughness and Residual Surface Film on Fused Quartz Optical FlatsApplied Optics, 1970
- Very Precise Thickness Measurement of Thin FilmsNature, 1963