Auger electron spectroscopy depth profiling of Ni/Cr multilayers by sputtering with N2+ ions

This publication has 26 references indexed in Scilit:

• Chemical reactions of N 2+ ion beams with group IV elements and their oxides
  Journal of Electron Spectroscopy and Related Phenomena, 1978
• AES depth profiling with N2+ ion sputtering
  Physics Letters A, 1976
• Quantitative analysis of low alloy steels by secondary ion mass spectrometry
  Analytical Chemistry, 1976
• The mechanism of simultaneous implantation and sputtering by high energy oxygen ions during secondary ion mass spectrometry (SIMS) analysis
  Surface Science, 1974
• Techniques for elemental composition profiling in thin films
  C R C Critical Reviews in Solid State Sciences, 1973
• Application of characteristic secondary ion mass spectra to a depth analysis of copper oxide on copper
  Radiation Effects, 1973
• Depth distributions of implanted atoms under the influence of surface erosion and diffusion
  Radiation Effects, 1973
• The sputtering of oxides part i: a survey of the experimental results
  Radiation Effects, 1973
• Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
  Physical Review B, 1969
• Ion Sorption in the Presence of Sputtering
  Proceedings of the Physical Society, 1962