Single Target Sputtering of As-Grown Superconducting Bi(-Pb)-Sr-Ca-Cu-O Thin Films on MgO(100)

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Abstract
As-grown superconducting thin films of Bi(-Pb)-Sr-Ca-Cu-O have been prepared on MgO (100) at 620–720°C by dc magnetron sputtering using a single target. The targets used were Pb-free Bi3Sr2Ca2.2Cu3O x and Pb-doped Bi3Pb2Sr2Ca2.2Cu3O x in nominal compositions. The as-grown process with no annealing yields c-axis oriented superconducting thin films with zero resistivity above 70 K. The superconducting properties of the thin films were affected by the substrate temperatures during film growth. The c-axis lattice constant of the films was also controlled to the value of 24–37 Å by changing the substrate temperature. The best film showed zero resistivity at 76 K and a superconducting 37 Å phase. The critical current density was measured at 4.2 K with J c=2×106 A/cm2.