Formation of Buried Oxynitride Layer into Silica Glass using Ion Beam
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Low-loss integrated optical waveguides fabricated by nitrogen ion implantationApplied Physics Letters, 1983
- Effect of nitrogen ion-implantation on silicate glassesJournal of Non-Crystalline Solids, 1982
- Surface Oxidation of Silicon Nitride FilmsJournal of the Electrochemical Society, 1976