Photon emission enhancement compared with the sputtering rate during thin film sputtering
- 1 February 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 57 (1) , L11-L12
- https://doi.org/10.1016/0040-6090(79)90434-6
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A comparison of surface analysis using ion scattering, ion-produced photons, and secondary ion emissionApplied Physics Letters, 1978
- Concentration profiles and sputtering yields measured by optical radiation of sputtered particlesRadiation Effects, 1976
- Theoretical and experimental aspects of secondary ion mass spectrometryVacuum, 1974