New tactile sensor chip with silicone rubber cover
- 1 September 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 84 (3) , 236-245
- https://doi.org/10.1016/s0924-4247(00)00310-1
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- A surface micromachined microtactile sensor arrayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Anthropomorphic tactile sensors for tactile feedback systemsPublished by SPIE-Intl Soc Optical Eng ,1997
- Mechanical filtering effect of elastic cover for tactile sensorIEEE Transactions on Robotics and Automation, 1997
- CMOS-compatible traction stress sensor for use in high-resolution tactile imagingSensors and Actuators A: Physical, 1996
- Silicon three-axial tactile sensorSensors and Actuators A: Physical, 1996
- Surface micromachined pressure sensors with integrated CMOS read-out electronicsSensors and Actuators A: Physical, 1994
- Tactile image detection using a 1k-element silicon pressure sensor arraySensors and Actuators A: Physical, 1990
- Process alternatives and scaling limits for high-density silicon tactile imagersSensors and Actuators A: Physical, 1990
- Zur Theorie der Berührung fester elastischer KörperAnnalen der Physik, 1904